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Proceedings Paper

A MEMS device for measuring laser power and spot size
Author(s): Anjan Ghosh; Sagnik Pal
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Paper Abstract

We propose a new method for using a MEMS device for measuring the power and spot size of a laser beam. The device consists of a doubly-clamped single crystal silicon micro-beam. A laser beam incident on the microstructure exerts an optical pressure on it and consequently the micro-beam gets strained. Analysis and simulations show that the laser power and spot size can be determined by measuring the strains at two different positions on the microstructure.

Paper Details

Date Published: 26 January 2009
PDF: 5 pages
Proc. SPIE 7222, Quantum Sensing and Nanophotonic Devices VI, 72220N (26 January 2009); doi: 10.1117/12.807342
Show Author Affiliations
Anjan Ghosh, Univ. of Oklahoma (United States)
Sagnik Pal, Univ. of Florida (United States)


Published in SPIE Proceedings Vol. 7222:
Quantum Sensing and Nanophotonic Devices VI
Manijeh Razeghi; Rengarajan Sudharsanan; Gail J. Brown, Editor(s)

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