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Proceedings Paper

A fast and high resolution x-ray imaging sensor for tape substrate inspection
Author(s): Jung-Yeol Yeom; Young-Jun Roh; Chang-Ook Jung; Dae-Hwa Jeong
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Paper Abstract

In automated Tape substrate (TS) inspection, machine vision is widely adopted for their high throughput and cost advantages. However, conventional methods are overly sensitive to foreign particles or have limitations in detecting three dimensional defects such as top over-etching. In an attempt to complement vision inspection systems, we proposed utilizing x-ray inspection. To implement x-ray inspection in TS application, we developed a prototype fast and high spatial resolution x-ray imaging sensor which functions at frame rate in excess of 30 fps and has a spatial resolution of 20 µm. In this paper, the development of the sensor and its performance is addressed and the efficiency of the x-ray inspection in detecting top over-etching defects will be shown with experimental studies.

Paper Details

Date Published: 17 November 2008
PDF: 8 pages
Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660Q (17 November 2008); doi: 10.1117/12.807340
Show Author Affiliations
Jung-Yeol Yeom, LG Electronics (Korea, Republic of)
Young-Jun Roh, LG Electronics (Korea, Republic of)
Chang-Ook Jung, LG Electronics (Korea, Republic of)
Dae-Hwa Jeong, LG Electronics (Korea, Republic of)

Published in SPIE Proceedings Vol. 7266:
Optomechatronic Technologies 2008

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