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Proceedings Paper

Focus-based depth estimation in the SEM
Author(s): C. Dahmen
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Paper Abstract

Depth estimation in the scanning electron microscope (SEM) is an important topic especially for automation purposes. The SEM only delivers two-dimensional (2D) images, which makes manipulation processes difficult. In spite of the high depth of focus in the SEM, it is still possible to use depth from focus as a depth estimation technique for nanomanipulation applications. This article deals with the extraction of depth information from SEM images using focus-based methods, and possibilities to improve the performance of these algorithms. A new approach is presented, combining 2D object tracking with focus-based depth estimation methods in order to obtain a possibility for limited three-dimensional tracking.

Paper Details

Date Published: 17 November 2008
PDF: 8 pages
Proc. SPIE 7266, Optomechatronic Technologies 2008, 72661O (17 November 2008); doi: 10.1117/12.807274
Show Author Affiliations
C. Dahmen, Univ. of Oldenburg (Germany)

Published in SPIE Proceedings Vol. 7266:
Optomechatronic Technologies 2008

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