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Proceedings Paper

Fabrication and characteristic evaluation of sub-micron gap liquid chromatography micro chip
Author(s): Chika Aminaka; Fumikazu Oohira; Takaki Suzuki; Eiji Majima
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Paper Abstract

We proposed a fabrication method of a sub-micron gap liquid chromatography micro chip by Silicon micromachining technology and performed a principle confirmation using this chip. This paper shows the fabrication process of the sub-micron gap in the flow channel which is made by the micro-pillar array formation by Silicon micromachining technology, and the deposition of poly-Si and successive thermal oxidation. It has become possible to fabricate the sub-micron order gap and control the gaps by the proposed method. Next, we deposited the ODS (octadecylsily) in the flow channel. Finally, using this chip, we performed the principle confirmation experiment of ODS deposition effect by injecting lysozyme into the flow channel. As the result, it was confirmed that the proposed method has the possibility of the separation analysis of biological samples.

Paper Details

Date Published: 17 November 2008
PDF: 9 pages
Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660H (17 November 2008); doi: 10.1117/12.807246
Show Author Affiliations
Chika Aminaka, Kagawa Univ. (Japan)
Fumikazu Oohira, Kagawa Univ. (Japan)
Takaki Suzuki, Kagawa Univ. (Japan)
Eiji Majima, ProteNova Corp. (Japan)


Published in SPIE Proceedings Vol. 7266:
Optomechatronic Technologies 2008

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