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Proceedings Paper

Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique
Author(s): Hui Hao; Ming Wang; Dongmei Guo
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Paper Abstract

A new self-mixing interferometer (SMI) based on temporal carrier phase shifting technique is presented. Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Triangular phase modulation of the beam is obtained by an electrooptic modulator (EOM) in the external cavity. The phase of SMI signal coming from the photodetector is extracted by the phase shift demodulation algorithm based on sampling technique. Theoretical analysis and simulation calculations are presented and some errors of this method are discussed. The interferometer is applied to measure the Micro-vibration of a high-precision commercial PZT with an accuracy of <10nm.

Paper Details

Date Published: 3 February 2009
PDF: 8 pages
Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71600W (3 February 2009); doi: 10.1117/12.807013
Show Author Affiliations
Hui Hao, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Dongmei Guo, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 7160:
2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications

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