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Proceedings Paper

Finite element analysis of the RF MEMS switch
Author(s): Fu Zhao; Ping Wang; Yanjue Gong; Liang Lv; Zhang Lei
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Paper Abstract

This paper takes the cantilever beam MEMS switch as an example to discuss mechanical principle and function simulation of the RF MEMS switch used in radio frequency communication. We select three kind s of the cantilever beams with different sections to analyze their switch characteristics, and with the help of finite element analysis(FEA) software ANSYS, multi-physical coupling analysis and simulation are carried out. The threshold voltage, the inherent frequency of these beams, optimal design, random vibration analysis and fatigue lifetime analysis are also discussed in detail. The results provide a good theoretical help to design various high performance RF MEMS switches with variational section beam.

Paper Details

Date Published: 3 February 2009
PDF: 8 pages
Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590I (3 February 2009); doi: 10.1117/12.806684
Show Author Affiliations
Fu Zhao, Beijing Technology and Business Univ. (China)
Ping Wang, Beijing Institute of Technology (China)
Yanjue Gong, Beijing Technology and Business Univ. (China)
Liang Lv, Beijing Technology and Business Univ. (China)
Zhang Lei, Beijing Technology and Business Univ. (China)


Published in SPIE Proceedings Vol. 7159:
2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications

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