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Proceedings Paper

Microstructure silicon force sensor and its simulation
Author(s): Ali El Mahdi Mohamed; Shangchun Fan; Zhanshe Guo
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Paper Abstract

This paper introduces an a practical silicon beam resonator attached to an E-type round diaphragm, which is used for measuring the concentrated force. Working principle of this sensor in introduced and relationship between the basic neutral frequency of the beam resonator and the concentrated force are analyzed and investigated. FEM (Finite Element Method) simulation is used to simulate the vibration features of the above beam resonant and the microsensor. Finally, based on the differential output mean, a set of optimum parameters of the above sensing unit is determined.

Paper Details

Date Published: 13 October 2008
PDF: 8 pages
Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712712 (13 October 2008); doi: 10.1117/12.806327
Show Author Affiliations
Ali El Mahdi Mohamed, Beijing Univ. of Aeronautics and Astronautics (China)
Shangchun Fan, Beijing Univ. of Aeronautics and Astronautics (China)
Zhanshe Guo, Beijing Univ. of Aeronautics and Astronautics (China)


Published in SPIE Proceedings Vol. 7127:
Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence

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