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Proceedings Paper

Research on the closed-loop system of silicon resonant micro-sensor based on FPGA
Author(s): Juan Zhong; Haomin Zhou
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Paper Abstract

This paper designs a digital closed-loop system on FPGA, aiming at silicon resonant pressure micro-sensor, which is inspirited by electricity, and picked up by resistances. This closed-loop system uses a method integrated by correlation detection and frequency scan to detect the resonance frequency of sensors, and then achieves pressure detection. Experiments have validated that this system can detect the resonance frequency of sensors effectively, overcoming the feebleness output signal and low SNR(signal noise ratio).

Paper Details

Date Published: 13 October 2008
PDF: 6 pages
Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712710 (13 October 2008); doi: 10.1117/12.806318
Show Author Affiliations
Juan Zhong, Beihang Univ. (China)
Haomin Zhou, Beihang Univ. (China)


Published in SPIE Proceedings Vol. 7127:
Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence

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