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Proceedings Paper

Characteristic analysis and simulation for polysilicon comb micro-accelerometer
Author(s): Fengli Liu; Yongping Hao
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Paper Abstract

Micro-accelerometer structure is one of common MEMS devices. Its performance and characteristic couldn't be detected in the package. Under the impact of static load shock, dynamic harmonic load shock and temperature variation, the response were investigated. When static load was applied on the top of the micro-accelerator, its displacement and contact force that applied on the bottom increased nonlinearly with the input load increased. While the dynamic harmonic load applied on micro-accelerator, the changes of the generalized acceleration, generalized displacement, generalized velocity, phase acceleration, phase displacement, phase velocity in six modes with different wave frequencies were gained in mode analyses. The impact of temperature on device performance was investigated and the ideal work environment temperature was obtained.

Paper Details

Date Published: 13 October 2008
PDF: 6 pages
Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 71270K (13 October 2008); doi: 10.1117/12.806270
Show Author Affiliations
Fengli Liu, Shenyang Ligong Univ. (China)
Yongping Hao, Shenyang Ligong Univ. (China)


Published in SPIE Proceedings Vol. 7127:
Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence

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