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Proceedings Paper

Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizer
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Paper Abstract

Piezoelectric micro nebulizer is a typical piezoelectric-solid-liquid coupling problem. A 2D FEM model was presented for this system. Numerical results show that when the piezoelectric actuator is vibrated, nozzle film also is generated vibration, and the phase relationship occurs to them, and the operation at the second resonance frequency is more desirable than others. A good agreement between experimental results and theoretical results confirmed the validity of the theoretical model we developed. Therefore, the design of micro nebulizer to consider only the amplitude of piezoelectric vibration is not comprehensive, we must also consider the nozzle film vibration, as well as the phase between the back film and the nozzle film, and this can provide guidance for the optimal design of micro nebulizer.

Paper Details

Date Published: 3 February 2009
PDF: 5 pages
Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590H (3 February 2009); doi: 10.1117/12.805822
Show Author Affiliations
Ming-wei Yang, Tsinghua Univ. (China)
Zhao-ying Zhou, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 7159:
2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications

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