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Proceedings Paper

In-line Calibration of Phase Shifters for Interferometer Measurement
Author(s): XuHua Wu; Lei Chen; Shaorong Xiao; YingChun Li
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Paper Abstract

In phase-shifting metrology, the accuracy of phase measurement is directly affected by the phaseshifting error, Accurate calibration of phase-shifter is very important if good measurement results are expected. A new in-line high accuracy phase-shifting calibration method based on Damped-Least-Square algorithm which provides stable convergence and accurate phase distribution is presented. By intercepting a line on the same position from a series of interferograms associating with the phase-shifter's characters and constructing the mathematic model for intensity of the line on each interferogram, the correlative coefficients of the mode's function can be solved, one of which is the wrapped phase. Then the voltage-unwrapped phase curve is obtained through unwrapping technique. Results of computer simulation show a high accuracy after several fast iterations. In addition, taking an experiment for example in our interferometer, the characteristic curve of phase shift over voltage change is presented in the end. Experiment results show it can be an in-line calibration method for phase-shifer in PSI.

Paper Details

Date Published: 3 February 2009
PDF: 7 pages
Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71601D (3 February 2009); doi: 10.1117/12.805502
Show Author Affiliations
XuHua Wu, Nanjing Univ. of Information Science & Technology (China)
Lei Chen, Nanjing Univ. of Science & Technology (China)
Shaorong Xiao, Nanjing Univ. of Information Science & Technology (China)
YingChun Li, Nanjing Univ. of Science & Technology (China)


Published in SPIE Proceedings Vol. 7160:
2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications

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