Share Email Print
cover

Proceedings Paper

Photo system based on scanning electron microscope for IC chip inspection
Author(s): Wei Liu; Jin Shen; Boxue Tan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

To overcome shortcoming of traditional optical device, a photo system based on scanning electron microscope has been developed. The photo system is composed of built-in compact piezoelectric stage and electron-beam controller. The stage is made up of piezoelectric driver and grating encoder system. It can operate in vacuum and non-magnetic environments. The electron-beam controller includes controlling model, deflection model, image acquisition model and position error feedback model. Scanning field can be calibrated before scanning. The photo system can scan the IC chip which is wider than one scanning field quickly by using this nano-positioning stage. The position error can be compensated by the position error feedback model, so the stitching precision between neighborhood images is improved. Legible IC image is obtained by using this system.

Paper Details

Date Published: 3 February 2009
PDF: 11 pages
Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 715903 (3 February 2009); doi: 10.1117/12.805301
Show Author Affiliations
Wei Liu, Shandong Univ. of Technology (China)
Jin Shen, Shandong Univ. of Technology (China)
Boxue Tan, Shandong Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7159:
2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications

© SPIE. Terms of Use
Back to Top