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Proceedings Paper

An experimental study of the fabrication of polycarbonate optical waveguides
Author(s): Jianguo Chen; Xiao-yang Zhang; Tong Zhang; Jing-song Zhu; Peng-qin Wu; Jing-lun Zhou; Jiang-feng Fan; Hao-feng Yan
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Paper Abstract

A novel polycarbonate (PC) was introduced to apply in the optical waveguide devices. PC has following distinct merits than common polycarbonate: good processability, high thermal stability up to 293 C°; and high optical transparency. Optical properties of absorption behavior and propagation loss were investigated in slab waveguides, and low propagation losses of 0.335 dB/cm (@1550nm) and 0.197 dB/cm @632.8nm) have been achieved by using prismcoupler. Additionally, straight optical waveguide and MMI coupler of ring resonator were fabricated using ultraviolet (UV) cured resin Norland optical adhesive 61 (NOA61) as under or upper cladding layer and polycarbonate as waveguide core-layer material through conventional methods such as spin coating, photolithography and reactive ion etching (RIE). The process was studied in detail and the experimental results were given.

Paper Details

Date Published: 9 February 2009
PDF: 7 pages
Proc. SPIE 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration, 71580Y (9 February 2009); doi: 10.1117/12.804769
Show Author Affiliations
Jianguo Chen, Southeast Univ. (China)
Xiao-yang Zhang, Southeast Univ. (China)
Tong Zhang, Southeast Univ. (China)
Jing-song Zhu, National Ctr. for Nanoscience and Technology (China)
Peng-qin Wu, Southeast Univ. (China)
Jing-lun Zhou, National Ctr. for Nanoscience and Technology (China)
Jiang-feng Fan, National Ctr. for Nanoscience and Technology (China)
Hao-feng Yan, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 7158:
2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration

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