Share Email Print
cover

Proceedings Paper

A needle above plane is electron optics model
Author(s): O. D. Potapkin
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Electron optics model of a cathode lens consisting of hyperboloid of rotation and a plane called "a needle above plane" is presented. The most important result is asymptotic crossover radius changing in wide range of tip radius changing and the half angle of the apex. The results can be useful for the description of thermionic guns for nanolithography.

Paper Details

Date Published: 5 June 2008
PDF: 8 pages
Proc. SPIE 7121, Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 712108 (5 June 2008); doi: 10.1117/12.804373
Show Author Affiliations
O. D. Potapkin, Moscow Institute of Radioengineering, Electronics and Automation (Russia)


Published in SPIE Proceedings Vol. 7121:
Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

© SPIE. Terms of Use
Back to Top