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Proceedings Paper

Silicon nanophotonic waveguides and their applications
Author(s): Wim Bogaerts; Liu Liu; Shankar Kumar Selvaraja; Pieter Dumon; Joost Brouckaert; Dirk Taillaert; Diedrik Vermeulen; Gunther Roelkens; Dries Van Thourhout; Roel Baets
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Paper Abstract

We discuss silicon photonic wires and components based on this technology, such as filters based on ring resonators, interferometers or arrayed waveguide gratings. The devices are fabricated using standard CMOS technology, including 193nm lithography. We also discuss their application in a number of demonstrator devices within different application fields.

Paper Details

Date Published: 11 November 2008
PDF: 13 pages
Proc. SPIE 7134, Passive Components and Fiber-based Devices V, 71341O (11 November 2008); doi: 10.1117/12.803440
Show Author Affiliations
Wim Bogaerts, Univ. Gent (Belgium)
Liu Liu, Univ. Gent (Belgium)
Shankar Kumar Selvaraja, Univ. Gent (Belgium)
Pieter Dumon, Univ. Gent (Belgium)
Joost Brouckaert, Univ. Gent (Belgium)
Dirk Taillaert, Univ. Gent (Belgium)
Diedrik Vermeulen, Univ. Gent (Belgium)
Gunther Roelkens, Univ. Gent (Belgium)
Dries Van Thourhout, Univ. Gent (Belgium)
Roel Baets, Univ. Gent (Belgium)

Published in SPIE Proceedings Vol. 7134:
Passive Components and Fiber-based Devices V
Ming-Jun Li; Ping Shum; Ian H. White; Xingkun Wu, Editor(s)

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