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Proceedings Paper

Analysis of the transmission spectra and the parameters extraction of the GaN-based films
Author(s): Chao Li; Xue Li; Jintong Xu; Yan Zhang; Xiangyang Li
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Paper Abstract

Nowadays, GaN-based multi-layer materials is developing fast, and it is important to know their interface and optical properties for devices design and fabrication. In this letter, the transmission spectra are analyzed, and the dependence of the transmission spectra on parameters of the samples is discussed. Sequentially, we obtain the transmission spectra of a series of GaN-based samples. Simulation of the transmission spectra is done and useful information is extracted. For one of our samples, the refractive index varies a little between 2.518 and 2.305 with the wavelength from 400 to 800nm, while the extinction coefficient is 6x-10-9.5exp(2700/λ), and the thickness is 2860nm. Finally, we get the dispersion relationship of the GaN and AlGaN films, and it is compared with the results of some other research groups.

Paper Details

Date Published: 18 November 2008
PDF: 9 pages
Proc. SPIE 7135, Optoelectronic Materials and Devices III, 71350F (18 November 2008); doi: 10.1117/12.803292
Show Author Affiliations
Chao Li, Shanghai Institute of Technical Physics (China)
Xue Li, Shanghai Institute of Technical Physics (China)
Jintong Xu, Shanghai Institute of Technical Physics (China)
Yan Zhang, Shanghai Institute of Technical Physics (China)
Xiangyang Li, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 7135:
Optoelectronic Materials and Devices III
Yi Luo; Jens Buus; Fumio Koyama; Yu-Hwa Lo, Editor(s)

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