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Proceedings Paper

Apparent nonlinear effect of the microscope on the laser Doppler vibrometer
Author(s): Hartono Sumali; Matthew S. Allen
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Paper Abstract

One powerful method for measuring the motion of microelectromechanical systems (MEMS) relies on a Laser Doppler Vibrometer (LDV) focused through an optical microscope. Recent data taken under a very simple and common condition demonstrate that the velocity signal produced by the LDV with an optical microscope may be different from the velocity signal produced by the LDV without a microscope. This is especially important if one wishes to estimate acceleration by differentiating velocity. In this study, the time derivatives of LDV signals are compared against the signal from an accelerometer when the LDV is focused through an optical microscope and without the microscope system. The signal from the LDV without the microscope is almost identical to the accelerometer signal. In contrast, the signal from the LDV with the microscope exhibits a nonlinear relationship with the accelerometer signal. Both the LDV and the accelerometer were measuring a sinusoidal velocity generated by an electromechanical shaker. The Fourier transform of the acceleration from the LDV with the microscope shows a multitude of high harmonics of the excitation frequency, which have much higher amplitudes than the harmonics present in the accelerometer signal. Without the microscope, the LDV gives a much less distorted sinusoidal signal, even after time differentiation. The distortion of the signal from the LDV is periodic, with the same period as the sinusoidal drive signal. The largest distortion occurs near points of maximum negative acceleration, corresponding to the positive displacement peak of the sinusoidal oscillation. Because the measured oscillation is out of plane, pseudo-vibrations caused by speckle noise do not explain the distortion. Instead, the distortion appears to be caused by the optics of the microscope.

Paper Details

Date Published: 17 June 2008
PDF: 9 pages
Proc. SPIE 7098, Eighth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 709817 (17 June 2008); doi: 10.1117/12.803165
Show Author Affiliations
Hartono Sumali, Sandia National Labs. (United States)
Matthew S. Allen, Univ. of Wisconsin, Madison (United States)

Published in SPIE Proceedings Vol. 7098:
Eighth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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