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Proceedings Paper

Micro-ring resonators fabricated by focused-ion-beam on SOI
Author(s): Jie Tian; Min Qiu
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Paper Abstract

We present the fabrication of high Q factor micro-ring resonators on SOI substrate by directly focused-ion-beam (FIB) milling. Micro-ring resonators with diameters of 10 μm and 80 μm are fabricated and their corresponding intrinsic Q factors are 4,000 and 130,000, respectively.

Paper Details

Date Published: 11 November 2008
PDF: 8 pages
Proc. SPIE 7136, Optical Transmission, Switching, and Subsystems VI, 71362G (11 November 2008); doi: 10.1117/12.803132
Show Author Affiliations
Jie Tian, KTH Royal Institute of Technology (Sweden)
Min Qiu, KTH Royal Institute of Technology (Sweden)


Published in SPIE Proceedings Vol. 7136:
Optical Transmission, Switching, and Subsystems VI
Ken-ichi Kitayama; Pierpaolo C. Ghiggino; Kim Roberts; Yikai Su, Editor(s)

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