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Proceedings Paper

Recent progress in ALD for optical coatings
Author(s): Mikko Ritala
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Paper Details

Date Published:
Proc. SPIE 7101, Advances in Optical Thin Films III, 71011E; doi: 10.1117/12.803015
Show Author Affiliations
Mikko Ritala, Univ. of Helsinki (Finland)

Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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