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Proceedings Paper

High energy microelectromechanical oscillator based on the electrostatic microactuator
Author(s): I. Baginsky; Edvard Kostsov; Victor Sobolev
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Paper Abstract

Electrostatic high energy micromotor based on the ferroelectric films is studied as applied to microelectromechanical devices operating in vibrational mode. It is shown that the micromotor can be efficiently used in high frequency micromechanical vibrators that are used in high energy MEMS devices, such as micropumps, microvalves, microinjectors, adaptive microoptic devices etc.

Paper Details

Date Published: 29 April 2008
PDF: 8 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70251E (29 April 2008); doi: 10.1117/12.802490
Show Author Affiliations
I. Baginsky, Institute of Automation and Electrometry (Russia)
Edvard Kostsov, Institute of Automation and Electrometry (Russia)
Victor Sobolev, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007

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