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Proceedings Paper

Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution
Author(s): Nikolay I. Chkhalo; Denis G. Raskin; Nikolay N. Salashchenko
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Paper Abstract

Using investigation of micromirrors of space light modulator as well as other objects as an example, real capabilities of the domestically produced interference microscope MII-4 equipped with a digital camera are demonstrated. It is shown that a resolution in a vertical direction provided by the microinterferometer lies in a sub nanometer range.

Paper Details

Date Published: 29 April 2008
PDF: 4 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702512 (29 April 2008); doi: 10.1117/12.802458
Show Author Affiliations
Nikolay I. Chkhalo, Institute for Physics of Microstructures (Russia)
Denis G. Raskin, Institute for Physics of Microstructures (Russia)
Nikolay N. Salashchenko, Institute for Physics of Microstructures (Russia)


Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007

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