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Proceedings Paper

Investigation of impurity composition of atomic hydrogen beam formed by a low-pressure arc-discharge source
Author(s): V. A. Kagadei; D. I. Proskurovski; S. V. Romanenko
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Paper Abstract

Results of impurity composition investigation of large-area atomic hydrogen beam formed by a low-pressure arc discharge source with self-heated cathode were cited. The study was performed on 18 metallic elements. Method, based on measurement of sheet concentration of metal atoms on Si sample surface before and after exposition in atomic hydrogen flow was used for determination of composition of impurities in atomic hydrogen beam. Measurement of sheet concentration of metal atoms was realized by ToF SIMS method. The method sensitivity was 108 at. cm-2. Principal reason of parasitic metal particles occurrence in the beam and the methods for reduction of metal impurity concentration in ΑH beam was investigated.

Paper Details

Date Published: 29 April 2008
PDF: 5 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70250B (29 April 2008); doi: 10.1117/12.802358
Show Author Affiliations
V. A. Kagadei, Institute of High Current Electronics (Russia)
D. I. Proskurovski, Institute of High Current Electronics (Russia)
S. V. Romanenko, Institute of High Current Electronics (Russia)


Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007

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