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Proceedings Paper

A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic properties
Author(s): Nikolay I. Chkhalo; Illarion A. Dorofeev; Nikolay N. Salashchenko; Mikhail N. Toropov
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Paper Abstract

On a base of the Kirchhoff-Helmholtz method and using the Green function for a half-space which is covered by a film of any thickness and with arbitrary optical properties, amplitude-phase characteristics of diffracted on a pin-hole field were calculated. Analysis was carried out for some materials of the film at radiation wave-length λ0=633 nm using experimental values of the dielectric constants. The diffracted wave front has deformations which dependent on the film thickness and material electrodynamic characteristics, and the observation angle. The deformation determined by the film thickness essentially limits an accuracy provided by point diffraction interferometers.

Paper Details

Date Published: 29 April 2008
PDF: 7 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702507 (29 April 2008); doi: 10.1117/12.802354
Show Author Affiliations
Nikolay I. Chkhalo, Institute for Physics of Microstructures (Russia)
Illarion A. Dorofeev, Institute for Physics of Microstructures (Russia)
Nikolay N. Salashchenko, Institute for Physics of Microstructures (Russia)
Mikhail N. Toropov, Institute for Physics of Microstructures (Russia)

Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007

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