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Proceedings Paper

A new source of a reference spherical wave for a point diffraction interferometer
Author(s): Nikolay I. Chkhalo; Alexander Yu. Klimov; Denis G. Raskin; Vladimir V. Rogov; Nikolay N. Salashchenko; Mikhail N. Toropov
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Paper Abstract

A new type of a spherical wave source based on a probe for a near-field microscope for a precision interferometry is reported. Experimental data of wave deformations of the light generated by the probes are given. For a numerical aperture of optics under study NA=0.22 the obtained deformations are low than λ/2000 for a red light of He-Ne laser.

Paper Details

Date Published: 29 April 2008
PDF: 4 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702506 (29 April 2008); doi: 10.1117/12.802353
Show Author Affiliations
Nikolay I. Chkhalo, Institute for Physics of Microstructures (Russia)
Alexander Yu. Klimov, Institute for Physics of Microstructures (Russia)
Denis G. Raskin, Institute for Physics of Microstructures (Russia)
Vladimir V. Rogov, Institute for Physics of Microstructures (Russia)
Nikolay N. Salashchenko, Institute for Physics of Microstructures (Russia)
Mikhail N. Toropov, Institute for Physics of Microstructures (Russia)


Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007

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