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Proceedings Paper

Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer
Author(s): N. Chkhalo; I. Zabrodin; I. Kas'kov; E. Kluenkov; A. Pestov; N. Salashchenko
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Paper Abstract

In the article a program for simulation of intensity of fluorescence of X-ray tubes (XRT) target materials excited by electrons with the energy less than 15 keV is described. The basis of the program is a modeling of interaction of fast electrons with a matter by the Monte-Carlo method. The paper has a comparison data of theoretical and experimental intensities of XRT radiation at Si Lα characteristic line and bremsstrahlung radiation of W target. Basing on the calculation a new XRT was developed.

Paper Details

Date Published: 29 April 2008
PDF: 5 pages
Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702504 (29 April 2008); doi: 10.1117/12.802350
Show Author Affiliations
N. Chkhalo, Institute for Physics of Microstructures (Russia)
I. Zabrodin, Institute for Physics of Microstructures (Russia)
I. Kas'kov, Institute for Physics of Microstructures (Russia)
E. Kluenkov, Institute for Physics of Microstructures (Russia)
A. Pestov, Institute for Physics of Microstructures (Russia)
N. Salashchenko, Institute for Physics of Microstructures (Russia)


Published in SPIE Proceedings Vol. 7025:
Micro- and Nanoelectronics 2007

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