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Proceedings Paper

Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry
Author(s): V. I. Teleshevsky; S. G. Grishin
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Paper Abstract

Methods of digital transformations of the phase measurement information in heterodyne laser interferometry with resolution below 1 nm is considered. These methods based on methods for precision time interval measurements. Application example of the methods using field programmable gate array (FPGA) is described.

Paper Details

Date Published: 29 April 2008
PDF: 7 pages
Proc. SPIE 7006, Lasers for Measurements and Information Transfer 2007, 70060E (29 April 2008); doi: 10.1117/12.802270
Show Author Affiliations
V. I. Teleshevsky, Moscow State Univ. of Technology Stankin (Russia)
S. G. Grishin, Moscow State Univ. of Technology Stankin (Russia)


Published in SPIE Proceedings Vol. 7006:
Lasers for Measurements and Information Transfer 2007

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