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Proceedings Paper

Laser applications in the field of MEMS
Author(s): Gabriel M. Moagar-Poladian; Zsolt Illyefalvi-Vitez; Balint Balogh; Dumitru Ulieru; Antonie Coraci
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Paper Abstract

The paper overviews some of the most important applications of lasers in the field of microsystems (MEMS). We present applications from both technology and MEMS testing. Since these applications cover a wide range, the presentation does not aim to offer a thorough, detailed presentation of each of these, but only to underline some of the most important directions and features. We present the respective applications, their working principles, their advantages and their drawbacks. In some cases we present examples of microstructures realized by using laser techniques.

Paper Details

Date Published: 29 April 2008
PDF: 10 pages
Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070K (29 April 2008); doi: 10.1117/12.801970
Show Author Affiliations
Gabriel M. Moagar-Poladian, IMT-Bucharest (Romania)
Zsolt Illyefalvi-Vitez, Technical Univ. Budapest (Romania)
Balint Balogh, Technical Univ. Budapest (Romania)
Dumitru Ulieru, ROMES S.A. (Romania)
Antonie Coraci, IMT-Bucharest (Romania)


Published in SPIE Proceedings Vol. 7007:
INDLAS 2007: Industrial Laser Applications

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