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Proceedings Paper

Automate generation of incremental linear networks masks by using photocomposition method with with multiple microphotographical reductions using laser microsystems
Author(s): Gheorghe I. Gheorghe; Octavian Dontu
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Paper Abstract

The paper treats high precision micro technologies for automate generation of linear incremental networks masks by using the photocomposition method with multiple micro photographical reductions using laser high sensitivity microsystems, for the manufacture of micro-sensors and micro-transducers for micro displacements with endowment in industrial and metrological laboratories. These laser micro technologies allow automate generation of incremental networks masks with incremental step of 0,1 µm ensuring necessary accuracy according to European and international standards as well as realization of linear incremental photoelectric rules divisor and vernier as marks ultra precise components of micro-sensors and microtransducers for micro displacements.

Paper Details

Date Published: 29 April 2008
PDF: 6 pages
Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070H (29 April 2008); doi: 10.1117/12.801967
Show Author Affiliations
Gheorghe I. Gheorghe, National Institute of Research and Development in Precision Mechanics (Romania)
Octavian Dontu, Polytechnical Univ. (Romania)

Published in SPIE Proceedings Vol. 7007:
INDLAS 2007: Industrial Laser Applications

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