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Proceedings Paper

Adaptive automatic fragmentation
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Paper Abstract

As more aggressive Resolution Enhancement Techniques (RET) are applied, the problem of correctly fragmenting edges of an OPC mask is becoming more complex. OPC recipes contain more lines devoted to control of fragmentation than anything else. This paper introduces a new Automatic Adaptive Fragmentation method that decreases the complexity of OPC recipes while providing the same or better quality of results. The adaptive fragmentation is guided by just a few simple rules that provide flexible fragmentation while adhering to mask manufacturing rule constraints.

Paper Details

Date Published: 17 October 2008
PDF: 9 pages
Proc. SPIE 7122, Photomask Technology 2008, 712243 (17 October 2008); doi: 10.1117/12.801508
Show Author Affiliations
Mohamed Serag El-Din Habib, Mentor Graphics Corp. (United States)


Published in SPIE Proceedings Vol. 7122:
Photomask Technology 2008
Hiroichi Kawahira; Larry S. Zurbrick, Editor(s)

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