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Proceedings Paper

Fabrication studies for scaling photonic MEMS micro-shutter designs
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Paper Abstract

This paper will investigate micro-shutter MEMS "fabrication techniques" and processes to identify opportunities and barriers for successful implementation of micro-shutter technologies to enable adaptive coded aperture imaging and nonimaging systems. The use of photonic MEMS for creating adaptive coded apertures has been gaining momentum since 2007. Both Industry-based1, 2 and University-based3 studies have demonstrated their unique solutions for implementing MEMS-based micro-shutter technologies; however, there are many unique and novel MEMS-based "fabrication and characterization" processes and solutions that will be considered herein as we explore micro-shutter technologies. This paper discusses challenges and opportunities that may arise from in-house fabrication of MEMS which may prevent and/or improve structural uniformity, reproducibility, & reliability. This paper will also discuss characterization of the micro-shutters to include mechanical, electrical and optical properties. The "open and close" speeds of the micro-shutter device will also be assessed from a scaling perspective to determine usability.

Paper Details

Date Published: 19 August 2008
PDF: 8 pages
Proc. SPIE 7096, Adaptive Coded Aperture Imaging and Non-Imaging Sensors II, 70960G (19 August 2008); doi: 10.1117/12.800475
Show Author Affiliations
Derrick Langley, Air Force Research Lab. (United States)
Stanley Rogers, Air Force Research Lab. (United States)
Lavern Starman, Air Force Institute of Technology (United States)

Published in SPIE Proceedings Vol. 7096:
Adaptive Coded Aperture Imaging and Non-Imaging Sensors II
David P. Casasent; Stanley Rogers, Editor(s)

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