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Proceedings Paper

A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
Author(s): J. Hastanin; Y. Renotte; K. Fleury-Frenette; J. M. Defise; S. Habraken
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Paper Abstract

This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multi-material) micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.

Paper Details

Date Published: 2 October 2008
PDF: 9 pages
Proc. SPIE 7113, Electro-Optical and Infrared Systems: Technology and Applications V, 71131C (2 October 2008); doi: 10.1117/12.799854
Show Author Affiliations
J. Hastanin, Univ. de Liège (Belgium)
Y. Renotte, Univ. de Liège (Belgium)
K. Fleury-Frenette, Ctr. Spatial de Liège (Belgium)
J. M. Defise, Ctr. Spatial de Liège (Belgium)
S. Habraken, Univ. de Liège (Belgium)
Ctr. Spatial de Liège (Belgium)


Published in SPIE Proceedings Vol. 7113:
Electro-Optical and Infrared Systems: Technology and Applications V
David A. Huckridge; Reinhard R. Ebert, Editor(s)

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