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Proceedings Paper

Development of a hybrid monitoring strategy to the deposition of chirped mirrors by plasma-ion assisted electron evaporation
Author(s): Olaf Stenzel; Steffen Wilbrandt; Norbert Kaiser; Dieter Fasold
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Paper Abstract

We report on a hybrid monitoring strategy, which makes use of quartz crystal monitoring and broadband optical monitoring data in application to the deposition of chirped mirrors for the near infrared spectral region. We present a short description of the basic monitoring concept, the experimental setup, and the data elaboration facilities of the developed optical monitoring system OptiMon. Although being flexible enough to be implemented into different types of deposition system, we focus here on the application of our monitoring system for coating preparation with Advanced Plasma Source (APS) assisted electron beam evaporation. Chirped mirrors have been prepared using SiO2 and Ta2O5 as low and high index materials, respectively. The layers are characterized by in-situ transmission spectroscopy, ex-situ transmission and reflection spectroscopy, and white light interferometry to determine the group delay dispersion GDD. Basing on characterization results, we demonstrate and discuss the relative benefits of the developed monitoring strategy.

Paper Details

Date Published: 25 September 2008
PDF: 10 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 71011Y (25 September 2008); doi: 10.1117/12.799711
Show Author Affiliations
Olaf Stenzel, Fraunhofer IOF (Germany)
Steffen Wilbrandt, Fraunhofer IOF (Germany)
Norbert Kaiser, Fraunhofer IOF (Germany)
Dieter Fasold, JENOPTIK Laser, Optik, Systeme GmbH (Germany)

Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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