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Proceedings Paper

Single-layer and multilayer mirrors for current and next-generation light sources
Author(s): Michael Störmer; Christian Horstmann; Dietrich Häussler; Erdmann Spiecker; Frank Siewert; Frank Scholze; Frank Hertlein; Wolfgang Jäger; Rüdiger Bormann
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Paper Abstract

Current and next-generation light sources, for instance third generation synchrotron sources, FLASH and the future project X-FEL require single-layer and multilayer mirrors with an active optical length of more than one meter. At the GKSS research centre, a new sputtering system for the deposition of single-layer and multilayers has been installed. This new system is able to manufacture mirrors with a maximum deposition length of 1.5m. In this paper we are going to present the first results of this challenging system. The mirror properties are investigated by means of X-ray reflectometry, transmission electron microscopy and interference microscopy. The performance of the mirrors is analyzed, considering X-ray reflectivity, film thickness, micro-roughness and the uniformity of these properties over the whole deposition length. The results will be discussed and compared with former results.

Paper Details

Date Published: 3 September 2008
PDF: 9 pages
Proc. SPIE 7077, Advances in X-Ray/EUV Optics and Components III, 707705 (3 September 2008); doi: 10.1117/12.798895
Show Author Affiliations
Michael Störmer, GKSS-Forschungszentrum Geesthacht GmbH (Germany)
Christian Horstmann, GKSS-Forschungszentrum Geesthacht GmbH (Germany)
Dietrich Häussler, Christian-Albrechts-Univ. Kiel (Germany)
Erdmann Spiecker, Christian-Albrechts-Univ. Kiel (Germany)
Frank Siewert, BESSY Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung mbH (Germany)
Frank Scholze, Physikalisch-Technische Bundesanstalt (Germany)
Frank Hertlein, Incoatec GmbH (Germany)
Wolfgang Jäger, Christian-Albrechts-Univ. Kiel (Germany)
Rüdiger Bormann, GKSS-Forschungszentrum Geesthacht GmbH (Germany)

Published in SPIE Proceedings Vol. 7077:
Advances in X-Ray/EUV Optics and Components III
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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