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Proceedings Paper

Strategies for low cost imprint molds
Author(s): M. P. C. Watts
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Paper Abstract

The Cost of ownership (COO) due to the mold can be minimized by first creating the smallest possible original. The cost of this original can be reduced by using the lowest possible resolution pattern generator. If the pattern is regular, then analog pattern generation such as interferometry can be used. The small original is then copied to cover the area by either Step and Repeat or Tiling. Finally multiple working copies are made in a tooling tree for production imprint. The cost and life of the working copies depends on the imprint technology.

Paper Details

Date Published: 9 September 2008
PDF: 6 pages
Proc. SPIE 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V, 70390A (9 September 2008); doi: 10.1117/12.798222
Show Author Affiliations
M. P. C. Watts, Impattern Solutions (United States)

Published in SPIE Proceedings Vol. 7039:
Nanoengineering: Fabrication, Properties, Optics, and Devices V
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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