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Proceedings Paper

A simple method for measuring the small displacements
Author(s): Kun-Huang Chen; Jing-Heng Chen; Kun-Tsan Chen; Her-Lin Chiueh; Jiun-You Lin; Nung-Yu Wu
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Paper Abstract

In this study, a simple method for measuring the small displacements is presented. When a circularly polarized heterodyne light beam reflected from a mirror is incident into a hemi-spherical prism and is reflected at the base of the prism. Then the reflected light beam passes through an analyzer for interference. With properly chosen azimuth angles of transmission axis of the analyzer, the phase difference between s- and p- polarized light is sensitive to the incident angle near the internal reflection polarization angle. The phase difference can be accurately measured with the heterodyne interferometry. The small displacement of the mirror causes a small variation of incident angle and a phase change. Therefore, substituting the phase difference into special derived equations; the small displacement can be determined. The proposed method has advantages of common-path configuration and heterodyne interferometry.

Paper Details

Date Published: 11 August 2008
PDF: 8 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640V (11 August 2008); doi: 10.1117/12.798201
Show Author Affiliations
Kun-Huang Chen, Feng Chia Univ. (Taiwan)
Jing-Heng Chen, Feng Chia Univ. (Taiwan)
Kun-Tsan Chen, Lung Hwa Univ. of Science and Technology (Taiwan)
Her-Lin Chiueh, Lung Hwa Univ. of Science and Technology (Taiwan)
Jiun-You Lin, National Changhua Univ. of Education (Taiwan)
Nung-Yu Wu, Feng Chia Univ. (Taiwan)


Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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