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Paper Abstract
The tremendous development of optical technologies and new manufacturing methods places challenging demands on
metrology. Tools are required which allow for a rapid and sensitive inspection of the quality and homogeneity of surface
finish even on large and curved surfaces. Light scattering measurements are best suited to meet these requirements.
Recently developed instruments for scatter measurements at various wavelengths are presented in this paper. Examples
of application are presented for diamond-turned and polished surfaces as well as for supersmooth EUV mirrors. In
addition to laboratory-based instruments, compact and table-top tools currently being developed are briefly presented.
Paper Details
Date Published: 25 September 2008
PDF: 9 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 71020F (25 September 2008); doi: 10.1117/12.797964
Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)
PDF: 9 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 71020F (25 September 2008); doi: 10.1117/12.797964
Show Author Affiliations
Sven Schröder, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Angela Duparré, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)
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