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Proceedings Paper

Experience using a double pass Shack-Hartmann set-up on a DUV high NA high performance lens
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Paper Abstract

Shack-Hartmann wave front sensors (SHS) are an accurate and highly versatile tool for characterizing and adjusting high performance optical systems, especially in the DUV wavelength range. The conventional set-up uses a single path approach. An illuminated pinhole is placed in the object plane and the sensor in the exit pupil of the system under test. This approach is applicable up to a NA of about 0.9 because of the limited ability of a pinhole to illuminate high numerical apertures. Beyond the limit a double pass set-up is necessary. The double pass approach also allows a higher precision and the application of multi-position tests well-known from interferometry. A set-up will be shown which can be easily integrated into existing Shack-Hartmann test benches. Some exemplary data will be given comparing results from single pass and double pass measurements.

Paper Details

Date Published: 25 September 2008
PDF: 10 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 71020P (25 September 2008); doi: 10.1117/12.797726
Show Author Affiliations
Markus Augustin, Jenoptik Laser Optik Systeme GmbH (Germany)
Stefan Müller-Pfeiffer, Jenoptik Laser Optik Systeme GmbH (Germany)
Lienhard Körner, Jenoptik Laser Optik Systeme GmbH (Germany)
Oliver Falkenstörfer, Jenoptik Laser Optik Systeme GmbH (Germany)

Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)

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