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Proceedings Paper

Micro-holographic methods for sub-micrometer grating fabrication in fused silica with UV femtosecond laser
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Paper Abstract

The optical layouts incorporating binary phase diffractive grating and a standard micro-objective were used for femtosecond microfabrication of periodical structures in fused silica. Two beams, generated in Talbot type interferometer, interfered on a surface and in the bulk of the sample. The method suggested allows better control over the transverse size of the grating pitch, and thus control the reflection strength of the waveguide or fibre grating. We present the examples of direct inscription of the sub-micrometer periodical structures using a 267 nm femtosecond laser radiation.

Paper Details

Date Published: 27 September 2008
PDF: 9 pages
Proc. SPIE 7100, Optical Design and Engineering III, 71000T (27 September 2008); doi: 10.1117/12.797681
Show Author Affiliations
M. Dubov, Aston Univ. (United Kingdom)
R. K. Nasyrov, Institute of Automation and Electrometry (Russia)
D. N. Nikogosyan, Univ. College Cork (Ireland)
A. G. Poleshchuk, Institute of Automation and Electrometry (Russia)
V. Mezentsev, Aston Univ. (United Kingdom)
I. Bennion, Aston Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 7100:
Optical Design and Engineering III
Laurent Mazuray; Jean-Luc Tissot; Jeffrey M. Raynor; Rolf Wartmann; Andrew Wood, Editor(s)

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