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Proceedings Paper

Laser induced fluorescence and absorption measurements for DUV optical thin film characterization
Author(s): Ch. Mühlig; W. Triebel; S. Kufert; S. Bublitz
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Paper Abstract

Residual absorption in optical thin films due to impurities or defects causes thermal lens formation upon high power DUV laser irradiation. Furthermore, it may be one reason for functional degradation during prolonged laser irradiation. Pulsed ArF laser induced fluorescence (LIF) and direct absorption measurements (LID technique) are applied to investigate high reflecting coatings made from LaF3, MgF2 and AlF3 with respect to the influence of different raw materials and deposition temperatures. LIF measurements reveal emission bands that are partially attributed to certain impurities or defects which either origin from the raw material or the coating process. In addition, LIF measurements of single MgF2 and LaF3 layers are performed to investigate different raw material qualities and coating processes. The experimental results show the potential of both techniques for sensitive accompanying of coating process development.

Paper Details

Date Published: 26 September 2008
PDF: 9 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 71011R (26 September 2008); doi: 10.1117/12.797676
Show Author Affiliations
Ch. Mühlig, Institute of Photonic Technology (Germany)
W. Triebel, Institute of Photonic Technology (Germany)
S. Kufert, Institute of Photonic Technology (Germany)
S. Bublitz, Institute of Photonic Technology (Germany)


Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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