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Proceedings Paper

Profilometric characterization of DOEs with continuous microrelief
Author(s): V. P. Korolkov; S. V. Ostapenko; R. V. Shimansky
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Paper Abstract

Methodology of local characterization of continuous-relief diffractive optical elements has been discussed. The local profile depth can be evaluated using "approximated depth" defined without taking a profile near diffractive zone boundaries into account. Several methods to estimate the approximated depth have been offered.

Paper Details

Date Published: 25 September 2008
PDF: 11 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710209 (25 September 2008); doi: 10.1117/12.797673
Show Author Affiliations
V. P. Korolkov, Institute of Automation and Electrometry (Russia)
S. V. Ostapenko, Institute of Automation and Electrometry (Russia)
R. V. Shimansky, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)

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