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Proceedings Paper

Measurement of optical constants of thin films by non conventional ellipsometry, photothermal deflection spectroscopy and plasmon resonance spectroscopy
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Paper Abstract

An overview of methods for experimental determination of thin film optical constants is given, with an emphasis on recent advances in non conventional optical techniques. The generalized ellipsometry, the photothermal deflection spectroscopy (PDS) and the surface plasmon resonance (SPR) spectroscopy are more sophisticated and versatile tools, compared to traditional spectrophotometry and ellipsometry. The generalised ellipsometry in terms of Jones or Mueller matrix coefficients provides a more detailed model of the layered structure: material anisotropy, layer roughness, etc. The PDS may yield the accuracy of the direct absorption measurement unavailable with other approaches. The SPR phenomenon may be used for characterisation of ultra thin films, even having a complex spatial distribution, as well as to retrieve information on the refractive index depth distribution in the near-to-surface film zone. The advantages and drawbacks of these methods of thin film optical constants characterization are discussed. The complementary nature of various measurements allows deeper understanding of layered structures formation by non destructive optical methods. The examples of application of these techniques for characterization of single films and multilayers are given.

Paper Details

Date Published: 25 September 2008
PDF: 13 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 71010R (25 September 2008); doi: 10.1117/12.797660
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Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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