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Proceedings Paper

Development of a goniometric light scatter instrument with sample imaging ability
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Paper Abstract

The principle of a new scattering measurement system including a mobile lighting and a fixed CCD array is described. This new system allows a spatially resolved light scattering characterization. Moreover it is possible to separate localized defects contribution from the local roughness measurement. The comprehensive characterization of optical coatings can be performed with this set-up, and some examples will be given.

Paper Details

Date Published: 25 September 2008
PDF: 15 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710207 (25 September 2008); doi: 10.1117/12.797621
Show Author Affiliations
Myriam Zerrad, Institut Fresnel, CNRS (France)
Michel Lequime, Institut Fresnel, CNRS (France)
Carole Deumié, Institut Fresnel, CNRS (France)
Claude Amra, Institut Fresnel, CNRS (France)


Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)

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