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Proceedings Paper

Computer simulation of coating processes with monochromatic monitoring
Author(s): A. Zöller; M. Boos; H. Hagedorn; B. Romanov
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Paper Abstract

For the production of high performance multilayer systems optical monitoring is essential. Substantial progress was achieved by the introduction of direct monitoring on the rotating substrate holder. It is a complex task to develop a stable monitoring strategy for multilayers with a large number of layers and irregular thicknesses. The verification and improvement requires the feedback of more or less numerous real coating runs. This expensive and time consuming trial and error method can be reduced significantly by computer simulation of coating runs. A new software tool which simulates the coating process with monochromatic optical monitoring is introduced. Process instabilities are described by systematic and random errors of the deposition rate, refractive indices, etc. For the simulation of the monitoring curve real monochromatic bandwidth, signal noise, measurement frequency, etc. are taken into account. A UV-IR cut filter and a single notch filter design were simulated with virtual deposition runs. In both cases the simulation results were confirmed by real coating processes.

Paper Details

Date Published: 25 September 2008
PDF: 7 pages
Proc. SPIE 7101, Advances in Optical Thin Films III, 71010G (25 September 2008); doi: 10.1117/12.797612
Show Author Affiliations
A. Zöller, Leybold Optics GmbH (Germany)
M. Boos, Leybold Optics GmbH (Germany)
H. Hagedorn, Leybold Optics GmbH (Germany)
B. Romanov, Leybold Optics GmbH (Germany)

Published in SPIE Proceedings Vol. 7101:
Advances in Optical Thin Films III
Norbert Kaiser; Michel Lequime; H. Angus Macleod, Editor(s)

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