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Proceedings Paper

3D profilometer employing white-light interferometry for microstructures with large-bevel inclines in brightness-enhanced films
Author(s): Wei Cheng Wang; Yan Jen Su; Shih Hsuan Kuo
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Paper Abstract

This study employed white-light interferometry to measure the three-dimensional (3D) profiles, roughness, and dimensions of brightness-enhanced films (BEFs) that exhibited roof-shaped profiles with large-bevel inclines that could not be successfully measured by conventional optical inspection. A scanning white-light interferometer (SWLI) was used to obtain image information from both the symmetrical sides of inclines in the BEFs. A feasible structure with an angle-tuning mechanism was also introduced to enable the scanning white-light interferometer to rotate the angle of vision according to the bevel angle of the incline in the BEF. Further, the profiles of the BEFs could be reconstructed successfully through a series of image processing techniques. Now, the allowable bevel angle of the inclines in the BEF is not greater than 45°. The experimental results confirmed that this approach can successfully measure the 3D profiles of large-bevel inclines of microstructures as well as the roughness and dimensions of BEFs.

Paper Details

Date Published: 11 August 2008
PDF: 12 pages
Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 70630Z (11 August 2008); doi: 10.1117/12.797595
Show Author Affiliations
Wei Cheng Wang, Industrial Technology Research Institute (Taiwan)
Yan Jen Su, Industrial Technology Research Institute (Taiwan)
Shih Hsuan Kuo, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 7063:
Interferometry XIV: Techniques and Analysis
Joanna Schmit; Katherine Creath; Catherine E. Towers, Editor(s)

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