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Proceedings Paper

Optical inspection of micro-electromechanical systems
Author(s): I. A. Sokolov; M. A. Bryushinin; P. M. Karavaev; S. H. Khan; K-T-V. Grattan
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Paper Abstract

We report the results of utilization of wide-gap photorefractive sillenite crystals as adaptive photodetectors (AP) for optical inspection of micro-electromechanical systems. The operation principle of AP is based on two-wave mixing and non-steady-state photoelectromotive force effects in photorefractive crystals. The results of measurements of small vibration amplitudes and resonant frequencies of the diffusely scattering objects and micro-electromechanical systems are given. The presented adaptive interferometric systems are suitable for industrial applications.

Paper Details

Date Published: 26 September 2008
PDF: 8 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710210 (26 September 2008); doi: 10.1117/12.797559
Show Author Affiliations
I. A. Sokolov, A.F. Ioffe Physical-Technical Institute (Russia)
M. A. Bryushinin, A.F. Ioffe Physical-Technical Institute (Russia)
P. M. Karavaev, A.F. Ioffe Physical-Technical Institute (Russia)
S. H. Khan, City Univ. (United Kingdom)
K-T-V. Grattan, City Univ. (United Kingdom)


Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)

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