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Proceedings Paper

Integrated quantum efficiency, reflectance, topography and stress metrology for solar cell manufacturing
Author(s): Wojtek J. Walecki; Fanny Szondy
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Paper Abstract

We report application of phase shifting interferometric measurements to study of the spatially resolved quantum efficiency (QE) of the semiconductor solar-cells. In our method solar-cell is illuminated by two sets of mutually spatially orthogonal fringe patterns of known frequency, and varying phase (shifted phase). We report theoretical results obtained using simple analytical model describing properties of small spot size defects, and preliminary experimental results validating this method. The new method and new apparatus can be also used for studies of spectrally resolved QE.

Paper Details

Date Published: 11 August 2008
PDF: 8 pages
Proc. SPIE 7064, Interferometry XIV: Applications, 70640A (11 August 2008); doi: 10.1117/12.797541
Show Author Affiliations
Wojtek J. Walecki, Sunrise Optical LLC (United States)
Fanny Szondy, Sunrise Optical LLC (United States)

Published in SPIE Proceedings Vol. 7064:
Interferometry XIV: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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