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Proceedings Paper

Three-dimensional broadband FDTD optical simulations of CMOS image sensor
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Paper Abstract

In this paper, we present the results of rigorous electromagnetic broadband simulations applied to CMOS image sensors as well as experimental measurements. We firstly compare the results of 1D, 2D, and 3D broadband simulations in the visible range (380nm-720nm) of a 1.75μm CMOS image sensor, emphasizing the limitations of 1D and 2D simulations and the need of 3D modeling, particularly to rigorously simulate parameters like Quantum Efficiency. Then we illustrate broadband simulations by two proposed solutions that improve the spectral response of the sensor: an antireflective coating, and the reduction of the optical stack. We finally show that results from experimental measurements are in agreement with the simulated results.

Paper Details

Date Published: 27 September 2008
PDF: 12 pages
Proc. SPIE 7100, Optical Design and Engineering III, 71002J (27 September 2008); doi: 10.1117/12.797417
Show Author Affiliations
A. Crocherie, STMicroelectronics (France)
J. Vaillant, STMicroelectronics (France)
F. Hirigoyen, STMicroelectronics (France)

Published in SPIE Proceedings Vol. 7100:
Optical Design and Engineering III
Laurent Mazuray; Jean-Luc Tissot; Jeffrey M. Raynor; Rolf Wartmann; Andrew Wood, Editor(s)

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