Share Email Print

Proceedings Paper

Localized measurements of optical thickness variations in femtosecond trimmed structures
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Currently, the utilization of high power ultrafast lasers to induce optical changes in structures for the purpose of locally drawing patterns with dimensions inferior to the diffraction limit is well-established and controlled. Using this technique, we aim to modify the refractive index and/or the geometrical parameters of an optical interferential filter composed of successive thin layers. This local optimization will then allow the improvement or tuning of the performances of the optical filters. Thereafter, it is necessary to characterize these local modifications to achieve the final response of the expected filter. In our work, we developed a dedicated optical system, based on Fabry-Perot interferometry, to measure optical thickness, ranging from 10-3 to 10-4, with a high spatial resolution (in the order of 5×5μm). We present here our preliminary results carried out on calibrated test samples.

Paper Details

Date Published: 25 September 2008
PDF: 10 pages
Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710203 (25 September 2008); doi: 10.1117/12.797415
Show Author Affiliations
A. L. Lereu, Institut Fresnel, CNRS (France)
F. Lemarchand, Institut Fresnel, CNRS (France)
M. Lequime, Institut Fresnel, CNRS (France)

Published in SPIE Proceedings Vol. 7102:
Optical Fabrication, Testing, and Metrology III
Angela Duparré; Roland Geyl, Editor(s)

© SPIE. Terms of Use
Back to Top