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Proceedings Paper

Coating-induced wavefront aberrations
Author(s): D. Doering; K. Forcht
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Paper Abstract

The antireflection coatings which are used on lenses and other optical interfaces can have a profound effect on the image quality formed by an optical system. This paper evaluates the effects on optical performance of s- and p-phase shifts due to coatings. Coating design and lens design are usually treated as separate tasks, since the coating-induced wavefront aberrations are considered insignificant. As demands on optical systems increase (NA>0.9, wavelength <400nm, strehl ratio >95%), it is shown, that coating induced-wavefront aberrations can be the dominating aberration within an optical system. The wavefront aberrations induced by different antireflection coatings on an optical imaging system are numerically evaluated as an example. It is concluded that coating design and optical design have to be optimized in one task to achieve the best optical performance.

Paper Details

Date Published: 27 September 2008
PDF: 10 pages
Proc. SPIE 7100, Optical Design and Engineering III, 71000E (27 September 2008); doi: 10.1117/12.797414
Show Author Affiliations
D. Doering, Carl Zeiss AG (Germany)
K. Forcht, Carl Zeiss SMT AG (Germany)


Published in SPIE Proceedings Vol. 7100:
Optical Design and Engineering III
Laurent Mazuray; Rolf Wartmann; Andrew Wood; Jean-Luc Tissot; Jeffrey M. Raynor, Editor(s)

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