Share Email Print
cover

Proceedings Paper

Structural changes in graded band-gap epitaxial layers HgCdTe after ion implantation
Author(s): R. A. Zaplitnyy; I. M. Fodchuk; T. A. Kazemirskiy; A. P. Vlasov; O. Yu. Bonchyk; A. Barcz; P. S. Zieba; Z. Swiatek; W. Maziarz
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The results of X-ray AFM, SEM, and SIMS studies of near-surface regions of HgCdTe graded-gap epitaxial layers obtained by high-temperature annealing in vapour of the main components have been presented. We used ISOVPE layers of HgCdTe grown on CdTe substrates the surface of which was implanted by As ions. The AFM investigation has shown that the morphology of surfaces of HgCdTe structures obtained at the same conditions is significantly influenced by the crystal orientation of the initial substrates of CdTe. By means of SIMS and SEM analysis a substantial increase of the molar content of HgCdTe solid solution on the surface of ion-implanted epitaxial layers after high-temperature annealing has been observed. It is shown that large gradients of composite HgCdTe solid solution are formed in the near-surface regions of the epitaxial layers due to small changes in the thermodynamically equilibrium conditions of the process of high-temperature annealing.

Paper Details

Date Published: 22 April 2008
PDF: 6 pages
Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 70081C (22 April 2008); doi: 10.1117/12.797225
Show Author Affiliations
R. A. Zaplitnyy, Chernivtsi Fedkovich National Univ. (Ukraine)
I. M. Fodchuk, Chernivtsi Fedkovich National Univ. (Ukraine)
T. A. Kazemirskiy, Chernivtsi Fedkovich National Univ. (Ukraine)
A. P. Vlasov, Institute for Applied Problems of Mechanics and Mathematics (Ukraine)
O. Yu. Bonchyk, Institute for Applied Problems of Mechanics and Mathematics (Ukraine)
A. Barcz, Institute of Physics (Poland)
P. S. Zieba, Institute of Metallurgy and Materials Science (Poland)
Z. Swiatek, Institute of Metallurgy and Materials Science (Poland)
W. Maziarz, Institute of Metallurgy and Materials Science (Poland)


Published in SPIE Proceedings Vol. 7008:
Eighth International Conference on Correlation Optics

© SPIE. Terms of Use
Back to Top